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NOTICE: This Document was balloted and approved for withdrawal in 2010
Test methods have been shown to give statistically valid results
1 The purpose of this Standard is to standardize requirements for 45% potassium hydroxide solution used in the semiconductor industry and testing procedures to support those standards
This edition was approved for publication by the global Audits and Reviews Subcommittee on July 1
This document covers requirements for Dichlorosilane (SiH2Cl2) used in the semiconductor industry
E17300 - SEMI E173 - Specification for XML SECS-II Message Notation (SMN) Revision:SEMI E173-0721 - Current NOTICE: This Document was ballotedThe content of SECS II messages are defined in SEMI E5, SEMI Equipment Communication Standards 2 Message Content (SECS II). SECS II messages can be transmitted to and from and equipment using either the protocol defined in SEMI E4, Equipment Communication Standards1 Messages Transfer (SECS I) or the protocol defined in SEMI E37, High Speed Message Transfer (HSMS) Generic Services. The purpose of this Specification is to define a standardized notation
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